8/10/2010	10:47:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	10:47:13 AM	Recipe started at 10:47 AM
8/10/2010	10:47:13 AM	H2 valve closed
8/10/2010	10:47:13 AM	BCl3 valve closed
8/10/2010	10:47:13 AM	PH3 valve closed
8/10/2010	10:47:13 AM	SiCl4 pre valve closed
8/10/2010	10:47:13 AM	SiCl4 post valve closed
8/10/2010	10:47:13 AM	Main Vac valve closed
8/10/2010	10:47:13 AM	Bypass valve closed
8/10/2010	10:47:13 AM	Bubbler valve closed
8/10/2010	10:47:13 AM	Helium valve opened
8/10/2010	10:47:13 AM	Helium MFC set to  500.000000
8/10/2010	10:47:13 AM	H2 MFC set to  0.000000
8/10/2010	10:47:13 AM	BCl3 MFC set to  0.000000
8/10/2010	10:47:13 AM	PHl3 MFC set to  0.000000
8/10/2010	10:47:13 AM	SiCl4 MFC set to  0.000000
8/10/2010	10:47:13 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:47:13 AM	Tube furnace set to 0
8/10/2010	10:47:47 AM	Helium valve closed
8/10/2010	10:47:47 AM	H2 valve closed
8/10/2010	10:47:47 AM	BCl3 valve closed
8/10/2010	10:47:47 AM	PH3 valve closed
8/10/2010	10:47:47 AM	SiCl4 pre valve closed
8/10/2010	10:47:47 AM	SiCl4 post valve closed
8/10/2010	10:47:47 AM	Main Vac valve closed
8/10/2010	10:47:47 AM	Bypass valve closed
8/10/2010	10:47:47 AM	Bubbler valve closed
8/10/2010	10:47:47 AM	Helium MFC set to  0.000000
8/10/2010	10:47:47 AM	H2 MFC set to  0.000000
8/10/2010	10:47:47 AM	BCl3 MFC set to  0.000000
8/10/2010	10:47:47 AM	PHl3 MFC set to  0.000000
8/10/2010	10:47:47 AM	SiCl4 MFC set to  0.000000
8/10/2010	10:47:47 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:47:48 AM	Tube furnace set to 0
8/10/2010	10:47:48 AM	Run finished at 10:47 AM
8/10/2010	10:47:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	10:53:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	10:53:16 AM	Recipe started at 10:53 AM
8/10/2010	10:53:16 AM	Helium valve closed
8/10/2010	10:53:16 AM	H2 valve closed
8/10/2010	10:53:16 AM	BCl3 valve closed
8/10/2010	10:53:16 AM	PH3 valve closed
8/10/2010	10:53:16 AM	SiCl4 pre valve closed
8/10/2010	10:53:16 AM	SiCl4 post valve closed
8/10/2010	10:53:16 AM	Main Vac valve closed
8/10/2010	10:53:16 AM	Bubbler valve closed
8/10/2010	10:53:16 AM	Bypass valve opened
8/10/2010	10:53:16 AM	Helium MFC set to  0.000000
8/10/2010	10:53:16 AM	H2 MFC set to  0.000000
8/10/2010	10:53:16 AM	BCl3 MFC set to  0.000000
8/10/2010	10:53:16 AM	PHl3 MFC set to  0.000000
8/10/2010	10:53:16 AM	SiCl4 MFC set to  0.000000
8/10/2010	10:53:16 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:53:16 AM	Tube furnace set to 0
8/10/2010	10:53:57 AM	Helium valve closed
8/10/2010	10:53:57 AM	H2 valve closed
8/10/2010	10:53:57 AM	BCl3 valve closed
8/10/2010	10:53:57 AM	PH3 valve closed
8/10/2010	10:53:57 AM	SiCl4 pre valve closed
8/10/2010	10:53:57 AM	SiCl4 post valve closed
8/10/2010	10:53:57 AM	Bubbler valve closed
8/10/2010	10:53:57 AM	Main Vac valve opened
8/10/2010	10:53:57 AM	Bypass valve opened
8/10/2010	10:53:57 AM	Helium MFC set to  0.000000
8/10/2010	10:53:57 AM	H2 MFC set to  0.000000
8/10/2010	10:53:57 AM	BCl3 MFC set to  0.000000
8/10/2010	10:53:57 AM	PHl3 MFC set to  0.000000
8/10/2010	10:53:57 AM	SiCl4 MFC set to  0.000000
8/10/2010	10:53:57 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:53:57 AM	Tube furnace set to 0
8/10/2010	10:54:57 AM	H2 valve closed
8/10/2010	10:54:57 AM	BCl3 valve closed
8/10/2010	10:54:57 AM	PH3 valve closed
8/10/2010	10:54:57 AM	SiCl4 pre valve closed
8/10/2010	10:54:57 AM	SiCl4 post valve closed
8/10/2010	10:54:57 AM	Bubbler valve closed
8/10/2010	10:54:57 AM	Helium valve opened
8/10/2010	10:54:57 AM	Main Vac valve opened
8/10/2010	10:54:57 AM	Bypass valve opened
8/10/2010	10:54:57 AM	Helium MFC set to  100.000000
8/10/2010	10:54:57 AM	H2 MFC set to  0.000000
8/10/2010	10:54:57 AM	BCl3 MFC set to  0.000000
8/10/2010	10:54:57 AM	PHl3 MFC set to  0.000000
8/10/2010	10:54:57 AM	SiCl4 MFC set to  0.000000
8/10/2010	10:54:57 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:54:57 AM	Tube furnace set to 0
8/10/2010	11:03:57 AM	Helium valve closed
8/10/2010	11:03:57 AM	H2 valve closed
8/10/2010	11:03:57 AM	BCl3 valve closed
8/10/2010	11:03:57 AM	PH3 valve closed
8/10/2010	11:03:57 AM	SiCl4 pre valve closed
8/10/2010	11:03:57 AM	SiCl4 post valve closed
8/10/2010	11:03:57 AM	Bubbler valve closed
8/10/2010	11:03:57 AM	Main Vac valve opened
8/10/2010	11:03:57 AM	Bypass valve opened
8/10/2010	11:03:57 AM	Helium MFC set to  0.000000
8/10/2010	11:03:57 AM	H2 MFC set to  0.000000
8/10/2010	11:03:57 AM	BCl3 MFC set to  0.000000
8/10/2010	11:03:57 AM	PHl3 MFC set to  0.000000
8/10/2010	11:03:57 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:03:57 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:03:57 AM	Tube furnace set to 0
8/10/2010	11:04:57 AM	H2 valve closed
8/10/2010	11:04:57 AM	BCl3 valve closed
8/10/2010	11:04:57 AM	PH3 valve closed
8/10/2010	11:04:57 AM	SiCl4 pre valve closed
8/10/2010	11:04:57 AM	SiCl4 post valve closed
8/10/2010	11:04:57 AM	Bubbler valve closed
8/10/2010	11:04:57 AM	Helium valve opened
8/10/2010	11:04:57 AM	Main Vac valve opened
8/10/2010	11:04:57 AM	Bypass valve opened
8/10/2010	11:04:57 AM	Helium MFC set to  100.000000
8/10/2010	11:04:57 AM	H2 MFC set to  0.000000
8/10/2010	11:04:57 AM	BCl3 MFC set to  0.000000
8/10/2010	11:04:57 AM	PHl3 MFC set to  0.000000
8/10/2010	11:04:57 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:04:57 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:04:57 AM	Tube furnace set to 0
8/10/2010	11:13:57 AM	Helium valve closed
8/10/2010	11:13:57 AM	H2 valve closed
8/10/2010	11:13:57 AM	BCl3 valve closed
8/10/2010	11:13:57 AM	PH3 valve closed
8/10/2010	11:13:57 AM	SiCl4 pre valve closed
8/10/2010	11:13:57 AM	SiCl4 post valve closed
8/10/2010	11:13:57 AM	Bubbler valve closed
8/10/2010	11:13:57 AM	Main Vac valve opened
8/10/2010	11:13:57 AM	Bypass valve opened
8/10/2010	11:13:57 AM	Helium MFC set to  0.000000
8/10/2010	11:13:57 AM	H2 MFC set to  0.000000
8/10/2010	11:13:57 AM	BCl3 MFC set to  0.000000
8/10/2010	11:13:57 AM	PHl3 MFC set to  0.000000
8/10/2010	11:13:57 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:13:57 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:13:58 AM	Tube furnace set to 0
8/10/2010	11:14:58 AM	H2 valve closed
8/10/2010	11:14:58 AM	BCl3 valve closed
8/10/2010	11:14:58 AM	PH3 valve closed
8/10/2010	11:14:58 AM	SiCl4 pre valve closed
8/10/2010	11:14:58 AM	SiCl4 post valve closed
8/10/2010	11:14:58 AM	Bubbler valve closed
8/10/2010	11:14:58 AM	Helium valve opened
8/10/2010	11:14:58 AM	Main Vac valve opened
8/10/2010	11:14:58 AM	Bypass valve opened
8/10/2010	11:14:58 AM	Helium MFC set to  100.000000
8/10/2010	11:14:58 AM	H2 MFC set to  0.000000
8/10/2010	11:14:58 AM	BCl3 MFC set to  0.000000
8/10/2010	11:14:58 AM	PHl3 MFC set to  0.000000
8/10/2010	11:14:58 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:14:58 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:14:58 AM	Tube furnace set to 0
8/10/2010	11:23:58 AM	Helium valve closed
8/10/2010	11:23:58 AM	H2 valve closed
8/10/2010	11:23:58 AM	BCl3 valve closed
8/10/2010	11:23:58 AM	PH3 valve closed
8/10/2010	11:23:58 AM	SiCl4 pre valve closed
8/10/2010	11:23:58 AM	SiCl4 post valve closed
8/10/2010	11:23:58 AM	Bubbler valve closed
8/10/2010	11:23:58 AM	Main Vac valve opened
8/10/2010	11:23:58 AM	Bypass valve opened
8/10/2010	11:23:58 AM	Helium MFC set to  0.000000
8/10/2010	11:23:58 AM	H2 MFC set to  0.000000
8/10/2010	11:23:58 AM	BCl3 MFC set to  0.000000
8/10/2010	11:23:58 AM	PHl3 MFC set to  0.000000
8/10/2010	11:23:58 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:23:58 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:23:58 AM	Tube furnace set to 0
8/10/2010	11:23:59 AM	Run finished at 11:23 AM
8/10/2010	11:23:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:25:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:25:02 AM	Recipe started at 11:25 AM
8/10/2010	11:25:02 AM	Helium valve closed
8/10/2010	11:25:02 AM	H2 valve closed
8/10/2010	11:25:02 AM	BCl3 valve closed
8/10/2010	11:25:02 AM	PH3 valve closed
8/10/2010	11:25:02 AM	SiCl4 pre valve closed
8/10/2010	11:25:02 AM	SiCl4 post valve closed
8/10/2010	11:25:02 AM	Main Vac valve closed
8/10/2010	11:25:02 AM	Bubbler valve closed
8/10/2010	11:25:02 AM	Bypass valve opened
8/10/2010	11:25:02 AM	Helium MFC set to  0.000000
8/10/2010	11:25:02 AM	H2 MFC set to  0.000000
8/10/2010	11:25:02 AM	BCl3 MFC set to  0.000000
8/10/2010	11:25:02 AM	PHl3 MFC set to  0.000000
8/10/2010	11:25:02 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:25:02 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:25:03 AM	Tube furnace set to 0
8/10/2010	11:25:03 AM	Helium valve closed
8/10/2010	11:25:03 AM	H2 valve closed
8/10/2010	11:25:03 AM	BCl3 valve closed
8/10/2010	11:25:03 AM	PH3 valve closed
8/10/2010	11:25:03 AM	SiCl4 pre valve closed
8/10/2010	11:25:03 AM	SiCl4 post valve closed
8/10/2010	11:25:03 AM	Bubbler valve closed
8/10/2010	11:25:03 AM	Main Vac valve opened
8/10/2010	11:25:03 AM	Bypass valve opened
8/10/2010	11:25:03 AM	Helium MFC set to  0.000000
8/10/2010	11:25:03 AM	H2 MFC set to  0.000000
8/10/2010	11:25:03 AM	BCl3 MFC set to  0.000000
8/10/2010	11:25:03 AM	PHl3 MFC set to  0.000000
8/10/2010	11:25:03 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:25:03 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:25:03 AM	Tube furnace set to 0
8/10/2010	11:26:03 AM	H2 valve closed
8/10/2010	11:26:03 AM	BCl3 valve closed
8/10/2010	11:26:03 AM	PH3 valve closed
8/10/2010	11:26:03 AM	SiCl4 pre valve closed
8/10/2010	11:26:03 AM	SiCl4 post valve closed
8/10/2010	11:26:03 AM	Bubbler valve closed
8/10/2010	11:26:03 AM	Helium valve opened
8/10/2010	11:26:03 AM	Main Vac valve opened
8/10/2010	11:26:03 AM	Bypass valve opened
8/10/2010	11:26:03 AM	Helium MFC set to  100.000000
8/10/2010	11:26:03 AM	H2 MFC set to  0.000000
8/10/2010	11:26:03 AM	BCl3 MFC set to  0.000000
8/10/2010	11:26:03 AM	PHl3 MFC set to  0.000000
8/10/2010	11:26:03 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:26:03 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:26:03 AM	Tube furnace set to 0
8/10/2010	11:35:03 AM	Helium valve closed
8/10/2010	11:35:03 AM	H2 valve closed
8/10/2010	11:35:03 AM	BCl3 valve closed
8/10/2010	11:35:03 AM	PH3 valve closed
8/10/2010	11:35:03 AM	SiCl4 pre valve closed
8/10/2010	11:35:03 AM	SiCl4 post valve closed
8/10/2010	11:35:03 AM	Bubbler valve closed
8/10/2010	11:35:03 AM	Main Vac valve opened
8/10/2010	11:35:03 AM	Bypass valve opened
8/10/2010	11:35:03 AM	Helium MFC set to  0.000000
8/10/2010	11:35:03 AM	H2 MFC set to  0.000000
8/10/2010	11:35:03 AM	BCl3 MFC set to  0.000000
8/10/2010	11:35:03 AM	PHl3 MFC set to  0.000000
8/10/2010	11:35:03 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:35:03 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:35:03 AM	Tube furnace set to 0
8/10/2010	11:36:03 AM	H2 valve closed
8/10/2010	11:36:03 AM	BCl3 valve closed
8/10/2010	11:36:03 AM	PH3 valve closed
8/10/2010	11:36:03 AM	SiCl4 pre valve closed
8/10/2010	11:36:03 AM	SiCl4 post valve closed
8/10/2010	11:36:03 AM	Bubbler valve closed
8/10/2010	11:36:03 AM	Helium valve opened
8/10/2010	11:36:03 AM	Main Vac valve opened
8/10/2010	11:36:03 AM	Bypass valve opened
8/10/2010	11:36:03 AM	Helium MFC set to  100.000000
8/10/2010	11:36:03 AM	H2 MFC set to  0.000000
8/10/2010	11:36:03 AM	BCl3 MFC set to  0.000000
8/10/2010	11:36:03 AM	PHl3 MFC set to  0.000000
8/10/2010	11:36:03 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:36:03 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:36:04 AM	Tube furnace set to 0
8/10/2010	11:45:04 AM	Helium valve closed
8/10/2010	11:45:04 AM	H2 valve closed
8/10/2010	11:45:04 AM	BCl3 valve closed
8/10/2010	11:45:04 AM	PH3 valve closed
8/10/2010	11:45:04 AM	SiCl4 pre valve closed
8/10/2010	11:45:04 AM	SiCl4 post valve closed
8/10/2010	11:45:04 AM	Bubbler valve closed
8/10/2010	11:45:04 AM	Main Vac valve opened
8/10/2010	11:45:04 AM	Bypass valve opened
8/10/2010	11:45:04 AM	Helium MFC set to  0.000000
8/10/2010	11:45:04 AM	H2 MFC set to  0.000000
8/10/2010	11:45:04 AM	BCl3 MFC set to  0.000000
8/10/2010	11:45:04 AM	PHl3 MFC set to  0.000000
8/10/2010	11:45:04 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:45:04 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:45:04 AM	Tube furnace set to 0
8/10/2010	11:45:43 AM	H2 valve closed
8/10/2010	11:45:43 AM	BCl3 valve closed
8/10/2010	11:45:43 AM	PH3 valve closed
8/10/2010	11:45:43 AM	SiCl4 pre valve closed
8/10/2010	11:45:43 AM	SiCl4 post valve closed
8/10/2010	11:45:43 AM	Bubbler valve closed
8/10/2010	11:45:43 AM	Helium valve opened
8/10/2010	11:45:43 AM	Main Vac valve opened
8/10/2010	11:45:43 AM	Bypass valve opened
8/10/2010	11:45:43 AM	Helium MFC set to  100.000000
8/10/2010	11:45:43 AM	H2 MFC set to  0.000000
8/10/2010	11:45:43 AM	BCl3 MFC set to  0.000000
8/10/2010	11:45:43 AM	PHl3 MFC set to  0.000000
8/10/2010	11:45:43 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:45:43 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:45:44 AM	Tube furnace set to 0
8/10/2010	11:45:46 AM	Helium valve closed
8/10/2010	11:45:46 AM	H2 valve closed
8/10/2010	11:45:46 AM	BCl3 valve closed
8/10/2010	11:45:46 AM	PH3 valve closed
8/10/2010	11:45:46 AM	SiCl4 pre valve closed
8/10/2010	11:45:46 AM	SiCl4 post valve closed
8/10/2010	11:45:46 AM	Bubbler valve closed
8/10/2010	11:45:46 AM	Main Vac valve opened
8/10/2010	11:45:46 AM	Bypass valve opened
8/10/2010	11:45:46 AM	Helium MFC set to  0.000000
8/10/2010	11:45:46 AM	H2 MFC set to  0.000000
8/10/2010	11:45:46 AM	BCl3 MFC set to  0.000000
8/10/2010	11:45:46 AM	PHl3 MFC set to  0.000000
8/10/2010	11:45:46 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:45:46 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:45:46 AM	Tube furnace set to 0
8/10/2010	11:45:47 AM	Run finished at 11:45 AM
8/10/2010	11:45:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:46:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:46:54 AM	Recipe started at 11:46 AM
8/10/2010	11:46:54 AM	Helium valve closed
8/10/2010	11:46:54 AM	H2 valve closed
8/10/2010	11:46:54 AM	BCl3 valve closed
8/10/2010	11:46:54 AM	PH3 valve closed
8/10/2010	11:46:54 AM	SiCl4 pre valve closed
8/10/2010	11:46:54 AM	SiCl4 post valve closed
8/10/2010	11:46:54 AM	Main Vac valve closed
8/10/2010	11:46:54 AM	Bubbler valve closed
8/10/2010	11:46:54 AM	Bypass valve opened
8/10/2010	11:46:54 AM	Helium MFC set to  0.000000
8/10/2010	11:46:54 AM	H2 MFC set to  0.000000
8/10/2010	11:46:54 AM	BCl3 MFC set to  0.000000
8/10/2010	11:46:54 AM	PHl3 MFC set to  0.000000
8/10/2010	11:46:54 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:46:54 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:46:55 AM	Tube furnace set to 0
8/10/2010	11:46:55 AM	Helium valve closed
8/10/2010	11:46:55 AM	H2 valve closed
8/10/2010	11:46:55 AM	BCl3 valve closed
8/10/2010	11:46:55 AM	PH3 valve closed
8/10/2010	11:46:55 AM	SiCl4 pre valve closed
8/10/2010	11:46:55 AM	SiCl4 post valve closed
8/10/2010	11:46:55 AM	Bubbler valve closed
8/10/2010	11:46:55 AM	Main Vac valve opened
8/10/2010	11:46:55 AM	Bypass valve opened
8/10/2010	11:46:55 AM	Helium MFC set to  0.000000
8/10/2010	11:46:55 AM	H2 MFC set to  0.000000
8/10/2010	11:46:55 AM	BCl3 MFC set to  0.000000
8/10/2010	11:46:55 AM	PHl3 MFC set to  0.000000
8/10/2010	11:46:55 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:46:55 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:46:55 AM	Tube furnace set to 0
8/10/2010	11:47:55 AM	H2 valve closed
8/10/2010	11:47:55 AM	BCl3 valve closed
8/10/2010	11:47:55 AM	PH3 valve closed
8/10/2010	11:47:55 AM	SiCl4 pre valve closed
8/10/2010	11:47:55 AM	SiCl4 post valve closed
8/10/2010	11:47:55 AM	Bubbler valve closed
8/10/2010	11:47:55 AM	Helium valve opened
8/10/2010	11:47:55 AM	Main Vac valve opened
8/10/2010	11:47:55 AM	Bypass valve opened
8/10/2010	11:47:55 AM	Helium MFC set to  100.000000
8/10/2010	11:47:55 AM	H2 MFC set to  0.000000
8/10/2010	11:47:55 AM	BCl3 MFC set to  0.000000
8/10/2010	11:47:55 AM	PHl3 MFC set to  0.000000
8/10/2010	11:47:55 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:47:55 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:47:55 AM	Tube furnace set to 0
8/10/2010	11:48:21 AM	Run aborted at 11:48 AM
8/10/2010	11:48:21 AM	Helium valve closed
8/10/2010	11:48:21 AM	H2 valve closed
8/10/2010	11:48:21 AM	BCl3 valve closed
8/10/2010	11:48:21 AM	PH3 valve closed
8/10/2010	11:48:21 AM	SiCl4 pre valve closed
8/10/2010	11:48:21 AM	SiCl4 post valve closed
8/10/2010	11:48:21 AM	Bypass valve closed
8/10/2010	11:48:21 AM	Main Vac valve closed
8/10/2010	11:48:21 AM	Bubbler valve closed
8/10/2010	11:48:21 AM	Helium MFC set to  0.000000
8/10/2010	11:48:21 AM	H2 MFC set to  0.000000
8/10/2010	11:48:21 AM	BCl3 MFC set to  0.000000
8/10/2010	11:48:21 AM	PHl3 MFC set to  0.000000
8/10/2010	11:48:21 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:48:22 AM	Tube furnace set to 0
8/10/2010	11:48:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:48:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2010	11:48:25 AM	Recipe started at 11:48 AM
8/10/2010	11:48:25 AM	Helium valve closed
8/10/2010	11:48:25 AM	H2 valve closed
8/10/2010	11:48:25 AM	BCl3 valve closed
8/10/2010	11:48:25 AM	PH3 valve closed
8/10/2010	11:48:26 AM	SiCl4 pre valve closed
8/10/2010	11:48:26 AM	SiCl4 post valve closed
8/10/2010	11:48:26 AM	Main Vac valve closed
8/10/2010	11:48:26 AM	Bubbler valve closed
8/10/2010	11:48:26 AM	Bypass valve opened
8/10/2010	11:48:26 AM	Helium MFC set to  0.000000
8/10/2010	11:48:26 AM	H2 MFC set to  0.000000
8/10/2010	11:48:26 AM	BCl3 MFC set to  0.000000
8/10/2010	11:48:26 AM	PHl3 MFC set to  0.000000
8/10/2010	11:48:26 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:48:26 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:48:26 AM	Tube furnace set to 0
8/10/2010	11:48:26 AM	Helium valve closed
8/10/2010	11:48:26 AM	H2 valve closed
8/10/2010	11:48:26 AM	BCl3 valve closed
8/10/2010	11:48:26 AM	PH3 valve closed
8/10/2010	11:48:26 AM	SiCl4 pre valve closed
8/10/2010	11:48:26 AM	SiCl4 post valve closed
8/10/2010	11:48:26 AM	Bubbler valve closed
8/10/2010	11:48:26 AM	Main Vac valve opened
8/10/2010	11:48:26 AM	Bypass valve opened
8/10/2010	11:48:26 AM	Helium MFC set to  0.000000
8/10/2010	11:48:26 AM	H2 MFC set to  0.000000
8/10/2010	11:48:26 AM	BCl3 MFC set to  0.000000
8/10/2010	11:48:26 AM	PHl3 MFC set to  0.000000
8/10/2010	11:48:26 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:48:26 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:48:26 AM	Tube furnace set to 0
8/10/2010	11:48:26 AM	Run finished at 11:48 AM
8/10/2010	11:48:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2010	11:48:31 AM	Helium MFC set to  100.000000
8/10/2010	11:48:32 AM	Helium valve opened
8/10/2010	11:56:21 AM	Helium MFC set to  100.000000
8/10/2010	11:56:24 AM	Helium valve closed
8/10/2010	11:56:26 AM	Helium MFC set to  0.000000
8/10/2010	11:57:16 AM	Recipe started at 11:57 AM
8/10/2010	11:57:16 AM	Helium valve closed
8/10/2010	11:57:16 AM	BCl3 valve closed
8/10/2010	11:57:16 AM	PH3 valve closed
8/10/2010	11:57:16 AM	SiCl4 pre valve closed
8/10/2010	11:57:16 AM	SiCl4 post valve closed
8/10/2010	11:57:16 AM	Main Vac valve closed
8/10/2010	11:57:16 AM	Bypass valve closed
8/10/2010	11:57:16 AM	Bubbler valve closed
8/10/2010	11:57:16 AM	H2 valve opened
8/10/2010	11:57:16 AM	Helium MFC set to  0.000000
8/10/2010	11:57:16 AM	H2 MFC set to  500.000000
8/10/2010	11:57:16 AM	BCl3 MFC set to  0.000000
8/10/2010	11:57:16 AM	PHl3 MFC set to  0.000000
8/10/2010	11:57:16 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:57:16 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:57:16 AM	Tube furnace set to 1000
8/10/2010	11:58:34 AM	Helium valve closed
8/10/2010	11:58:34 AM	BCl3 valve closed
8/10/2010	11:58:34 AM	PH3 valve closed
8/10/2010	11:58:34 AM	SiCl4 pre valve closed
8/10/2010	11:58:34 AM	SiCl4 post valve closed
8/10/2010	11:58:34 AM	Main Vac valve closed
8/10/2010	11:58:34 AM	Bypass valve closed
8/10/2010	11:58:34 AM	H2 valve opened
8/10/2010	11:58:34 AM	Bubbler valve opened
8/10/2010	11:58:34 AM	Helium MFC set to  0.000000
8/10/2010	11:58:34 AM	H2 MFC set to  500.000000
8/10/2010	11:58:34 AM	BCl3 MFC set to  0.000000
8/10/2010	11:58:34 AM	PHl3 MFC set to  0.000000
8/10/2010	11:58:34 AM	SiCl4 MFC set to  0.000000
8/10/2010	11:58:34 AM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:58:35 AM	Tube furnace set to 1000
8/10/2010	12:18:35 PM	Helium valve closed
8/10/2010	12:18:35 PM	PH3 valve closed
8/10/2010	12:18:35 PM	Main Vac valve closed
8/10/2010	12:18:35 PM	Bypass valve closed
8/10/2010	12:18:35 PM	H2 valve opened
8/10/2010	12:18:35 PM	BCl3 valve opened
8/10/2010	12:18:35 PM	SiCl4 pre valve opened
8/10/2010	12:18:35 PM	SiCl4 post valve opened
8/10/2010	12:18:35 PM	Bubbler valve opened
8/10/2010	12:18:35 PM	Helium MFC set to  0.000000
8/10/2010	12:18:35 PM	H2 MFC set to  500.000000
8/10/2010	12:18:35 PM	BCl3 MFC set to  35.000000
8/10/2010	12:18:35 PM	PHl3 MFC set to  0.000000
8/10/2010	12:18:35 PM	SiCl4 MFC set to  50.000000
8/10/2010	12:18:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	12:18:35 PM	Tube furnace set to 1000
8/10/2010	12:30:35 PM	Helium valve closed
8/10/2010	12:30:35 PM	BCl3 valve closed
8/10/2010	12:30:35 PM	PH3 valve closed
8/10/2010	12:30:35 PM	SiCl4 pre valve closed
8/10/2010	12:30:35 PM	SiCl4 post valve closed
8/10/2010	12:30:35 PM	Main Vac valve closed
8/10/2010	12:30:35 PM	Bypass valve closed
8/10/2010	12:30:35 PM	H2 valve opened
8/10/2010	12:30:35 PM	Bubbler valve opened
8/10/2010	12:30:35 PM	Helium MFC set to  0.000000
8/10/2010	12:30:35 PM	H2 MFC set to  500.000000
8/10/2010	12:30:35 PM	BCl3 MFC set to  0.000000
8/10/2010	12:30:35 PM	PHl3 MFC set to  0.000000
8/10/2010	12:30:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	12:30:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	12:30:35 PM	Tube furnace set to 750
8/10/2010	12:50:35 PM	H2 valve closed
8/10/2010	12:50:35 PM	BCl3 valve closed
8/10/2010	12:50:35 PM	PH3 valve closed
8/10/2010	12:50:35 PM	SiCl4 pre valve closed
8/10/2010	12:50:35 PM	SiCl4 post valve closed
8/10/2010	12:50:35 PM	Main Vac valve closed
8/10/2010	12:50:35 PM	Bypass valve closed
8/10/2010	12:50:35 PM	Helium valve opened
8/10/2010	12:50:35 PM	Bubbler valve opened
8/10/2010	12:50:35 PM	Helium MFC set to  500.000000
8/10/2010	12:50:35 PM	H2 MFC set to  0.000000
8/10/2010	12:50:35 PM	BCl3 MFC set to  0.000000
8/10/2010	12:50:35 PM	PHl3 MFC set to  0.000000
8/10/2010	12:50:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	12:50:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	12:50:35 PM	Tube furnace set to 0
8/10/2010	1:10:35 PM	Helium valve closed
8/10/2010	1:10:35 PM	H2 valve closed
8/10/2010	1:10:35 PM	BCl3 valve closed
8/10/2010	1:10:35 PM	PH3 valve closed
8/10/2010	1:10:35 PM	SiCl4 pre valve closed
8/10/2010	1:10:35 PM	SiCl4 post valve closed
8/10/2010	1:10:35 PM	Main Vac valve closed
8/10/2010	1:10:35 PM	Bypass valve closed
8/10/2010	1:10:35 PM	Bubbler valve closed
8/10/2010	1:10:35 PM	Helium MFC set to  0.000000
8/10/2010	1:10:35 PM	H2 MFC set to  0.000000
8/10/2010	1:10:35 PM	BCl3 MFC set to  0.000000
8/10/2010	1:10:35 PM	PHl3 MFC set to  0.000000
8/10/2010	1:10:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	1:10:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	1:10:35 PM	Tube furnace set to 0
8/10/2010	1:10:35 PM	Run finished at 1:10 PM
8/10/2010	2:01:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	2:01:27 PM	Recipe started at 2:01 PM
8/10/2010	2:01:27 PM	Helium valve closed
8/10/2010	2:01:27 PM	H2 valve closed
8/10/2010	2:01:27 PM	BCl3 valve closed
8/10/2010	2:01:27 PM	PH3 valve closed
8/10/2010	2:01:27 PM	SiCl4 pre valve closed
8/10/2010	2:01:27 PM	SiCl4 post valve closed
8/10/2010	2:01:27 PM	Main Vac valve closed
8/10/2010	2:01:27 PM	Bubbler valve closed
8/10/2010	2:01:27 PM	Bypass valve opened
8/10/2010	2:01:27 PM	Helium MFC set to  0.000000
8/10/2010	2:01:27 PM	H2 MFC set to  0.000000
8/10/2010	2:01:27 PM	BCl3 MFC set to  0.000000
8/10/2010	2:01:27 PM	PHl3 MFC set to  0.000000
8/10/2010	2:01:27 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:01:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:01:27 PM	Tube furnace set to 0
8/10/2010	2:02:07 PM	Helium valve closed
8/10/2010	2:02:07 PM	H2 valve closed
8/10/2010	2:02:07 PM	BCl3 valve closed
8/10/2010	2:02:07 PM	PH3 valve closed
8/10/2010	2:02:07 PM	SiCl4 pre valve closed
8/10/2010	2:02:07 PM	SiCl4 post valve closed
8/10/2010	2:02:07 PM	Bubbler valve closed
8/10/2010	2:02:07 PM	Main Vac valve opened
8/10/2010	2:02:07 PM	Bypass valve opened
8/10/2010	2:02:07 PM	Helium MFC set to  0.000000
8/10/2010	2:02:07 PM	H2 MFC set to  0.000000
8/10/2010	2:02:07 PM	BCl3 MFC set to  0.000000
8/10/2010	2:02:07 PM	PHl3 MFC set to  0.000000
8/10/2010	2:02:07 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:02:07 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:02:07 PM	Tube furnace set to 0
8/10/2010	2:03:07 PM	H2 valve closed
8/10/2010	2:03:07 PM	BCl3 valve closed
8/10/2010	2:03:07 PM	PH3 valve closed
8/10/2010	2:03:07 PM	SiCl4 pre valve closed
8/10/2010	2:03:07 PM	SiCl4 post valve closed
8/10/2010	2:03:07 PM	Bubbler valve closed
8/10/2010	2:03:07 PM	Helium valve opened
8/10/2010	2:03:07 PM	Main Vac valve opened
8/10/2010	2:03:07 PM	Bypass valve opened
8/10/2010	2:03:07 PM	Helium MFC set to  100.000000
8/10/2010	2:03:07 PM	H2 MFC set to  0.000000
8/10/2010	2:03:07 PM	BCl3 MFC set to  0.000000
8/10/2010	2:03:07 PM	PHl3 MFC set to  0.000000
8/10/2010	2:03:07 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:03:07 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:03:07 PM	Tube furnace set to 0
8/10/2010	2:12:07 PM	Helium valve closed
8/10/2010	2:12:07 PM	H2 valve closed
8/10/2010	2:12:07 PM	BCl3 valve closed
8/10/2010	2:12:07 PM	PH3 valve closed
8/10/2010	2:12:07 PM	SiCl4 pre valve closed
8/10/2010	2:12:07 PM	SiCl4 post valve closed
8/10/2010	2:12:07 PM	Bubbler valve closed
8/10/2010	2:12:07 PM	Main Vac valve opened
8/10/2010	2:12:07 PM	Bypass valve opened
8/10/2010	2:12:07 PM	Helium MFC set to  0.000000
8/10/2010	2:12:07 PM	H2 MFC set to  0.000000
8/10/2010	2:12:07 PM	BCl3 MFC set to  0.000000
8/10/2010	2:12:07 PM	PHl3 MFC set to  0.000000
8/10/2010	2:12:07 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:12:07 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:12:07 PM	Tube furnace set to 0
8/10/2010	2:13:07 PM	H2 valve closed
8/10/2010	2:13:07 PM	BCl3 valve closed
8/10/2010	2:13:07 PM	PH3 valve closed
8/10/2010	2:13:07 PM	SiCl4 pre valve closed
8/10/2010	2:13:07 PM	SiCl4 post valve closed
8/10/2010	2:13:07 PM	Bubbler valve closed
8/10/2010	2:13:07 PM	Helium valve opened
8/10/2010	2:13:07 PM	Main Vac valve opened
8/10/2010	2:13:07 PM	Bypass valve opened
8/10/2010	2:13:07 PM	Helium MFC set to  100.000000
8/10/2010	2:13:07 PM	H2 MFC set to  0.000000
8/10/2010	2:13:07 PM	BCl3 MFC set to  0.000000
8/10/2010	2:13:07 PM	PHl3 MFC set to  0.000000
8/10/2010	2:13:07 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:13:07 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:13:08 PM	Tube furnace set to 0
8/10/2010	2:22:08 PM	Helium valve closed
8/10/2010	2:22:08 PM	H2 valve closed
8/10/2010	2:22:08 PM	BCl3 valve closed
8/10/2010	2:22:08 PM	PH3 valve closed
8/10/2010	2:22:08 PM	SiCl4 pre valve closed
8/10/2010	2:22:08 PM	SiCl4 post valve closed
8/10/2010	2:22:08 PM	Bubbler valve closed
8/10/2010	2:22:08 PM	Main Vac valve opened
8/10/2010	2:22:08 PM	Bypass valve opened
8/10/2010	2:22:08 PM	Helium MFC set to  0.000000
8/10/2010	2:22:08 PM	H2 MFC set to  0.000000
8/10/2010	2:22:08 PM	BCl3 MFC set to  0.000000
8/10/2010	2:22:08 PM	PHl3 MFC set to  0.000000
8/10/2010	2:22:08 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:22:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:22:08 PM	Tube furnace set to 0
8/10/2010	2:23:08 PM	H2 valve closed
8/10/2010	2:23:08 PM	BCl3 valve closed
8/10/2010	2:23:08 PM	PH3 valve closed
8/10/2010	2:23:08 PM	SiCl4 pre valve closed
8/10/2010	2:23:08 PM	SiCl4 post valve closed
8/10/2010	2:23:08 PM	Bubbler valve closed
8/10/2010	2:23:08 PM	Helium valve opened
8/10/2010	2:23:08 PM	Main Vac valve opened
8/10/2010	2:23:08 PM	Bypass valve opened
8/10/2010	2:23:08 PM	Helium MFC set to  100.000000
8/10/2010	2:23:08 PM	H2 MFC set to  0.000000
8/10/2010	2:23:08 PM	BCl3 MFC set to  0.000000
8/10/2010	2:23:08 PM	PHl3 MFC set to  0.000000
8/10/2010	2:23:08 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:23:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:23:08 PM	Tube furnace set to 0
8/10/2010	2:32:08 PM	Helium valve closed
8/10/2010	2:32:08 PM	H2 valve closed
8/10/2010	2:32:08 PM	BCl3 valve closed
8/10/2010	2:32:08 PM	PH3 valve closed
8/10/2010	2:32:08 PM	SiCl4 pre valve closed
8/10/2010	2:32:08 PM	SiCl4 post valve closed
8/10/2010	2:32:08 PM	Bubbler valve closed
8/10/2010	2:32:08 PM	Main Vac valve opened
8/10/2010	2:32:08 PM	Bypass valve opened
8/10/2010	2:32:08 PM	Helium MFC set to  0.000000
8/10/2010	2:32:08 PM	H2 MFC set to  0.000000
8/10/2010	2:32:08 PM	BCl3 MFC set to  0.000000
8/10/2010	2:32:08 PM	PHl3 MFC set to  0.000000
8/10/2010	2:32:08 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:32:08 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:32:08 PM	Tube furnace set to 0
8/10/2010	2:32:09 PM	Run finished at 2:32 PM
8/10/2010	2:32:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	2:40:59 PM	Helium MFC set to  100.000000
8/10/2010	2:41:00 PM	Helium valve opened
8/10/2010	2:58:11 PM	Helium MFC set to  100.000000
8/10/2010	2:58:11 PM	Helium valve closed
8/10/2010	2:58:13 PM	Helium MFC set to  0.000000
8/10/2010	2:59:01 PM	Recipe started at 2:59 PM
8/10/2010	2:59:01 PM	Helium valve closed
8/10/2010	2:59:01 PM	BCl3 valve closed
8/10/2010	2:59:01 PM	PH3 valve closed
8/10/2010	2:59:01 PM	SiCl4 pre valve closed
8/10/2010	2:59:01 PM	SiCl4 post valve closed
8/10/2010	2:59:01 PM	Main Vac valve closed
8/10/2010	2:59:01 PM	Bypass valve closed
8/10/2010	2:59:01 PM	Bubbler valve closed
8/10/2010	2:59:01 PM	H2 valve opened
8/10/2010	2:59:01 PM	Helium MFC set to  0.000000
8/10/2010	2:59:01 PM	H2 MFC set to  500.000000
8/10/2010	2:59:01 PM	BCl3 MFC set to  0.000000
8/10/2010	2:59:01 PM	PHl3 MFC set to  0.000000
8/10/2010	2:59:01 PM	SiCl4 MFC set to  0.000000
8/10/2010	2:59:01 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	2:59:01 PM	Tube furnace set to 1000
8/10/2010	3:00:21 PM	Helium valve closed
8/10/2010	3:00:21 PM	BCl3 valve closed
8/10/2010	3:00:21 PM	PH3 valve closed
8/10/2010	3:00:21 PM	SiCl4 pre valve closed
8/10/2010	3:00:21 PM	SiCl4 post valve closed
8/10/2010	3:00:21 PM	Main Vac valve closed
8/10/2010	3:00:21 PM	Bypass valve closed
8/10/2010	3:00:21 PM	H2 valve opened
8/10/2010	3:00:21 PM	Bubbler valve opened
8/10/2010	3:00:21 PM	Helium MFC set to  0.000000
8/10/2010	3:00:21 PM	H2 MFC set to  500.000000
8/10/2010	3:00:21 PM	BCl3 MFC set to  0.000000
8/10/2010	3:00:21 PM	PHl3 MFC set to  0.000000
8/10/2010	3:00:21 PM	SiCl4 MFC set to  0.000000
8/10/2010	3:00:21 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	3:00:21 PM	Tube furnace set to 1000
8/10/2010	3:20:21 PM	Helium valve closed
8/10/2010	3:20:21 PM	PH3 valve closed
8/10/2010	3:20:21 PM	Main Vac valve closed
8/10/2010	3:20:21 PM	Bypass valve closed
8/10/2010	3:20:21 PM	H2 valve opened
8/10/2010	3:20:21 PM	BCl3 valve opened
8/10/2010	3:20:21 PM	SiCl4 pre valve opened
8/10/2010	3:20:21 PM	SiCl4 post valve opened
8/10/2010	3:20:21 PM	Bubbler valve opened
8/10/2010	3:20:21 PM	Helium MFC set to  0.000000
8/10/2010	3:20:21 PM	H2 MFC set to  500.000000
8/10/2010	3:20:22 PM	BCl3 MFC set to  35.000000
8/10/2010	3:20:22 PM	PHl3 MFC set to  0.000000
8/10/2010	3:20:22 PM	SiCl4 MFC set to  50.000000
8/10/2010	3:20:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	3:20:22 PM	Tube furnace set to 1000
8/10/2010	3:32:22 PM	Helium valve closed
8/10/2010	3:32:22 PM	BCl3 valve closed
8/10/2010	3:32:22 PM	PH3 valve closed
8/10/2010	3:32:22 PM	SiCl4 pre valve closed
8/10/2010	3:32:22 PM	SiCl4 post valve closed
8/10/2010	3:32:22 PM	Main Vac valve closed
8/10/2010	3:32:22 PM	Bypass valve closed
8/10/2010	3:32:22 PM	H2 valve opened
8/10/2010	3:32:22 PM	Bubbler valve opened
8/10/2010	3:32:22 PM	Helium MFC set to  0.000000
8/10/2010	3:32:22 PM	H2 MFC set to  500.000000
8/10/2010	3:32:22 PM	BCl3 MFC set to  0.000000
8/10/2010	3:32:22 PM	PHl3 MFC set to  0.000000
8/10/2010	3:32:22 PM	SiCl4 MFC set to  0.000000
8/10/2010	3:32:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	3:32:22 PM	Tube furnace set to 750
8/10/2010	3:52:22 PM	H2 valve closed
8/10/2010	3:52:22 PM	BCl3 valve closed
8/10/2010	3:52:22 PM	PH3 valve closed
8/10/2010	3:52:22 PM	SiCl4 pre valve closed
8/10/2010	3:52:22 PM	SiCl4 post valve closed
8/10/2010	3:52:22 PM	Main Vac valve closed
8/10/2010	3:52:22 PM	Bypass valve closed
8/10/2010	3:52:22 PM	Helium valve opened
8/10/2010	3:52:22 PM	Bubbler valve opened
8/10/2010	3:52:22 PM	Helium MFC set to  500.000000
8/10/2010	3:52:22 PM	H2 MFC set to  0.000000
8/10/2010	3:52:22 PM	BCl3 MFC set to  0.000000
8/10/2010	3:52:22 PM	PHl3 MFC set to  0.000000
8/10/2010	3:52:22 PM	SiCl4 MFC set to  0.000000
8/10/2010	3:52:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	3:52:22 PM	Tube furnace set to 0
8/10/2010	4:11:13 PM	Helium valve closed
8/10/2010	4:11:13 PM	H2 valve closed
8/10/2010	4:11:13 PM	BCl3 valve closed
8/10/2010	4:11:13 PM	PH3 valve closed
8/10/2010	4:11:13 PM	SiCl4 pre valve closed
8/10/2010	4:11:13 PM	SiCl4 post valve closed
8/10/2010	4:11:13 PM	Main Vac valve closed
8/10/2010	4:11:13 PM	Bubbler valve closed
8/10/2010	4:11:13 PM	Bypass valve closed
8/10/2010	4:11:13 PM	Helium MFC set to  0.000000
8/10/2010	4:11:13 PM	H2 MFC set to  0.000000
8/10/2010	4:11:13 PM	BCl3 MFC set to  0.000000
8/10/2010	4:11:13 PM	PHl3 MFC set to  0.000000
8/10/2010	4:11:13 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:11:13 PM	Bypass solenoid MFC set to  760.000000
8/10/2010	4:11:13 PM	Tube furnace set to 0
8/10/2010	4:11:13 PM	Baratron reads 740.297493 Torr and NaOH valve is open.  Emergency exit.
8/10/2010	4:11:20 PM	Run aborted at 4:11 PM
8/10/2010	4:11:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	4:11:23 PM	Recipe started at 4:11 PM
8/10/2010	4:11:23 PM	H2 valve closed
8/10/2010	4:11:23 PM	BCl3 valve closed
8/10/2010	4:11:23 PM	PH3 valve closed
8/10/2010	4:11:23 PM	SiCl4 pre valve closed
8/10/2010	4:11:23 PM	SiCl4 post valve closed
8/10/2010	4:11:23 PM	Main Vac valve closed
8/10/2010	4:11:23 PM	Bypass valve closed
8/10/2010	4:11:23 PM	Bubbler valve closed
8/10/2010	4:11:23 PM	Helium valve opened
8/10/2010	4:11:23 PM	Helium MFC set to  500.000000
8/10/2010	4:11:23 PM	H2 MFC set to  0.000000
8/10/2010	4:11:23 PM	BCl3 MFC set to  0.000000
8/10/2010	4:11:23 PM	PHl3 MFC set to  0.000000
8/10/2010	4:11:23 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:11:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:11:23 PM	Tube furnace set to 0
8/10/2010	4:11:31 PM	Run aborted at 4:11 PM
8/10/2010	4:11:31 PM	Helium valve closed
8/10/2010	4:11:31 PM	H2 valve closed
8/10/2010	4:11:31 PM	BCl3 valve closed
8/10/2010	4:11:31 PM	PH3 valve closed
8/10/2010	4:11:31 PM	SiCl4 pre valve closed
8/10/2010	4:11:31 PM	SiCl4 post valve closed
8/10/2010	4:11:31 PM	Bypass valve closed
8/10/2010	4:11:31 PM	Main Vac valve closed
8/10/2010	4:11:31 PM	Bubbler valve closed
8/10/2010	4:11:31 PM	Helium MFC set to  0.000000
8/10/2010	4:11:31 PM	H2 MFC set to  0.000000
8/10/2010	4:11:31 PM	BCl3 MFC set to  0.000000
8/10/2010	4:11:31 PM	PHl3 MFC set to  0.000000
8/10/2010	4:11:31 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:11:31 PM	Tube furnace set to 0
8/10/2010	4:11:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	4:16:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	4:16:11 PM	Recipe started at 4:16 PM
8/10/2010	4:16:11 PM	Helium valve closed
8/10/2010	4:16:11 PM	H2 valve closed
8/10/2010	4:16:11 PM	BCl3 valve closed
8/10/2010	4:16:11 PM	PH3 valve closed
8/10/2010	4:16:11 PM	SiCl4 pre valve closed
8/10/2010	4:16:11 PM	SiCl4 post valve closed
8/10/2010	4:16:11 PM	Main Vac valve closed
8/10/2010	4:16:11 PM	Bubbler valve closed
8/10/2010	4:16:11 PM	Bypass valve opened
8/10/2010	4:16:11 PM	Helium MFC set to  0.000000
8/10/2010	4:16:11 PM	H2 MFC set to  0.000000
8/10/2010	4:16:11 PM	BCl3 MFC set to  0.000000
8/10/2010	4:16:11 PM	PHl3 MFC set to  0.000000
8/10/2010	4:16:11 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:16:11 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:16:11 PM	Tube furnace set to 0
8/10/2010	4:16:49 PM	Helium valve closed
8/10/2010	4:16:49 PM	H2 valve closed
8/10/2010	4:16:49 PM	BCl3 valve closed
8/10/2010	4:16:49 PM	PH3 valve closed
8/10/2010	4:16:49 PM	SiCl4 pre valve closed
8/10/2010	4:16:49 PM	SiCl4 post valve closed
8/10/2010	4:16:49 PM	Bubbler valve closed
8/10/2010	4:16:49 PM	Main Vac valve opened
8/10/2010	4:16:49 PM	Bypass valve opened
8/10/2010	4:16:49 PM	Helium MFC set to  0.000000
8/10/2010	4:16:49 PM	H2 MFC set to  0.000000
8/10/2010	4:16:49 PM	BCl3 MFC set to  0.000000
8/10/2010	4:16:49 PM	PHl3 MFC set to  0.000000
8/10/2010	4:16:49 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:16:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:16:49 PM	Tube furnace set to 0
8/10/2010	4:17:49 PM	H2 valve closed
8/10/2010	4:17:49 PM	BCl3 valve closed
8/10/2010	4:17:49 PM	PH3 valve closed
8/10/2010	4:17:49 PM	SiCl4 pre valve closed
8/10/2010	4:17:49 PM	SiCl4 post valve closed
8/10/2010	4:17:49 PM	Bubbler valve closed
8/10/2010	4:17:49 PM	Helium valve opened
8/10/2010	4:17:49 PM	Main Vac valve opened
8/10/2010	4:17:49 PM	Bypass valve opened
8/10/2010	4:17:49 PM	Helium MFC set to  100.000000
8/10/2010	4:17:49 PM	H2 MFC set to  0.000000
8/10/2010	4:17:49 PM	BCl3 MFC set to  0.000000
8/10/2010	4:17:49 PM	PHl3 MFC set to  0.000000
8/10/2010	4:17:49 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:17:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:17:49 PM	Tube furnace set to 0
8/10/2010	4:26:49 PM	Helium valve closed
8/10/2010	4:26:49 PM	H2 valve closed
8/10/2010	4:26:49 PM	BCl3 valve closed
8/10/2010	4:26:49 PM	PH3 valve closed
8/10/2010	4:26:49 PM	SiCl4 pre valve closed
8/10/2010	4:26:49 PM	SiCl4 post valve closed
8/10/2010	4:26:49 PM	Bubbler valve closed
8/10/2010	4:26:49 PM	Main Vac valve opened
8/10/2010	4:26:49 PM	Bypass valve opened
8/10/2010	4:26:49 PM	Helium MFC set to  0.000000
8/10/2010	4:26:49 PM	H2 MFC set to  0.000000
8/10/2010	4:26:49 PM	BCl3 MFC set to  0.000000
8/10/2010	4:26:49 PM	PHl3 MFC set to  0.000000
8/10/2010	4:26:49 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:26:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:26:49 PM	Tube furnace set to 0
8/10/2010	4:27:49 PM	H2 valve closed
8/10/2010	4:27:49 PM	BCl3 valve closed
8/10/2010	4:27:49 PM	PH3 valve closed
8/10/2010	4:27:49 PM	SiCl4 pre valve closed
8/10/2010	4:27:49 PM	SiCl4 post valve closed
8/10/2010	4:27:49 PM	Bubbler valve closed
8/10/2010	4:27:49 PM	Helium valve opened
8/10/2010	4:27:49 PM	Main Vac valve opened
8/10/2010	4:27:50 PM	Bypass valve opened
8/10/2010	4:27:50 PM	Helium MFC set to  100.000000
8/10/2010	4:27:50 PM	H2 MFC set to  0.000000
8/10/2010	4:27:50 PM	BCl3 MFC set to  0.000000
8/10/2010	4:27:50 PM	PHl3 MFC set to  0.000000
8/10/2010	4:27:50 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:27:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:27:50 PM	Tube furnace set to 0
8/10/2010	4:36:50 PM	Helium valve closed
8/10/2010	4:36:50 PM	H2 valve closed
8/10/2010	4:36:50 PM	BCl3 valve closed
8/10/2010	4:36:50 PM	PH3 valve closed
8/10/2010	4:36:50 PM	SiCl4 pre valve closed
8/10/2010	4:36:50 PM	SiCl4 post valve closed
8/10/2010	4:36:50 PM	Bubbler valve closed
8/10/2010	4:36:50 PM	Main Vac valve opened
8/10/2010	4:36:50 PM	Bypass valve opened
8/10/2010	4:36:50 PM	Helium MFC set to  0.000000
8/10/2010	4:36:50 PM	H2 MFC set to  0.000000
8/10/2010	4:36:50 PM	BCl3 MFC set to  0.000000
8/10/2010	4:36:50 PM	PHl3 MFC set to  0.000000
8/10/2010	4:36:50 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:36:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:36:50 PM	Tube furnace set to 0
8/10/2010	4:37:50 PM	H2 valve closed
8/10/2010	4:37:50 PM	BCl3 valve closed
8/10/2010	4:37:50 PM	PH3 valve closed
8/10/2010	4:37:50 PM	SiCl4 pre valve closed
8/10/2010	4:37:50 PM	SiCl4 post valve closed
8/10/2010	4:37:50 PM	Bubbler valve closed
8/10/2010	4:37:50 PM	Helium valve opened
8/10/2010	4:37:50 PM	Main Vac valve opened
8/10/2010	4:37:50 PM	Bypass valve opened
8/10/2010	4:37:50 PM	Helium MFC set to  100.000000
8/10/2010	4:37:50 PM	H2 MFC set to  0.000000
8/10/2010	4:37:50 PM	BCl3 MFC set to  0.000000
8/10/2010	4:37:50 PM	PHl3 MFC set to  0.000000
8/10/2010	4:37:50 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:37:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:37:50 PM	Tube furnace set to 0
8/10/2010	4:46:50 PM	Helium valve closed
8/10/2010	4:46:50 PM	H2 valve closed
8/10/2010	4:46:50 PM	BCl3 valve closed
8/10/2010	4:46:50 PM	PH3 valve closed
8/10/2010	4:46:50 PM	SiCl4 pre valve closed
8/10/2010	4:46:50 PM	SiCl4 post valve closed
8/10/2010	4:46:50 PM	Bubbler valve closed
8/10/2010	4:46:50 PM	Main Vac valve opened
8/10/2010	4:46:50 PM	Bypass valve opened
8/10/2010	4:46:50 PM	Helium MFC set to  0.000000
8/10/2010	4:46:50 PM	H2 MFC set to  0.000000
8/10/2010	4:46:50 PM	BCl3 MFC set to  0.000000
8/10/2010	4:46:50 PM	PHl3 MFC set to  0.000000
8/10/2010	4:46:50 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:46:50 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:46:50 PM	Tube furnace set to 0
8/10/2010	4:46:51 PM	Run finished at 4:46 PM
8/10/2010	4:46:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	4:47:41 PM	Helium MFC set to  100.000000
8/10/2010	4:47:43 PM	Helium valve opened
8/10/2010	4:50:56 PM	Helium valve closed
8/10/2010	4:50:58 PM	Helium MFC set to  0.000000
8/10/2010	4:51:39 PM	Recipe started at 4:51 PM
8/10/2010	4:51:39 PM	Helium valve closed
8/10/2010	4:51:39 PM	BCl3 valve closed
8/10/2010	4:51:39 PM	PH3 valve closed
8/10/2010	4:51:39 PM	SiCl4 pre valve closed
8/10/2010	4:51:39 PM	SiCl4 post valve closed
8/10/2010	4:51:39 PM	Main Vac valve closed
8/10/2010	4:51:39 PM	Bypass valve closed
8/10/2010	4:51:39 PM	Bubbler valve closed
8/10/2010	4:51:39 PM	H2 valve opened
8/10/2010	4:51:39 PM	Helium MFC set to  0.000000
8/10/2010	4:51:39 PM	H2 MFC set to  500.000000
8/10/2010	4:51:39 PM	BCl3 MFC set to  0.000000
8/10/2010	4:51:39 PM	PHl3 MFC set to  0.000000
8/10/2010	4:51:39 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:51:39 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:51:39 PM	Tube furnace set to 1000
8/10/2010	4:52:57 PM	Helium valve closed
8/10/2010	4:52:57 PM	BCl3 valve closed
8/10/2010	4:52:57 PM	PH3 valve closed
8/10/2010	4:52:57 PM	SiCl4 pre valve closed
8/10/2010	4:52:57 PM	SiCl4 post valve closed
8/10/2010	4:52:57 PM	Main Vac valve closed
8/10/2010	4:52:57 PM	Bypass valve closed
8/10/2010	4:52:57 PM	H2 valve opened
8/10/2010	4:52:57 PM	Bubbler valve opened
8/10/2010	4:52:57 PM	Helium MFC set to  0.000000
8/10/2010	4:52:57 PM	H2 MFC set to  500.000000
8/10/2010	4:52:57 PM	BCl3 MFC set to  0.000000
8/10/2010	4:52:57 PM	PHl3 MFC set to  0.000000
8/10/2010	4:52:57 PM	SiCl4 MFC set to  0.000000
8/10/2010	4:52:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	4:52:57 PM	Tube furnace set to 1000
8/10/2010	5:12:57 PM	Helium valve closed
8/10/2010	5:12:57 PM	PH3 valve closed
8/10/2010	5:12:57 PM	Main Vac valve closed
8/10/2010	5:12:57 PM	Bypass valve closed
8/10/2010	5:12:57 PM	H2 valve opened
8/10/2010	5:12:57 PM	BCl3 valve opened
8/10/2010	5:12:57 PM	SiCl4 pre valve opened
8/10/2010	5:12:57 PM	SiCl4 post valve opened
8/10/2010	5:12:57 PM	Bubbler valve opened
8/10/2010	5:12:57 PM	Helium MFC set to  0.000000
8/10/2010	5:12:57 PM	H2 MFC set to  500.000000
8/10/2010	5:12:57 PM	BCl3 MFC set to  35.000000
8/10/2010	5:12:57 PM	PHl3 MFC set to  0.000000
8/10/2010	5:12:57 PM	SiCl4 MFC set to  50.000000
8/10/2010	5:12:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	5:12:57 PM	Tube furnace set to 1000
8/10/2010	5:24:57 PM	Helium valve closed
8/10/2010	5:24:57 PM	BCl3 valve closed
8/10/2010	5:24:57 PM	PH3 valve closed
8/10/2010	5:24:57 PM	SiCl4 pre valve closed
8/10/2010	5:24:57 PM	SiCl4 post valve closed
8/10/2010	5:24:57 PM	Main Vac valve closed
8/10/2010	5:24:57 PM	Bypass valve closed
8/10/2010	5:24:57 PM	H2 valve opened
8/10/2010	5:24:57 PM	Bubbler valve opened
8/10/2010	5:24:57 PM	Helium MFC set to  0.000000
8/10/2010	5:24:57 PM	H2 MFC set to  500.000000
8/10/2010	5:24:57 PM	BCl3 MFC set to  0.000000
8/10/2010	5:24:57 PM	PHl3 MFC set to  0.000000
8/10/2010	5:24:57 PM	SiCl4 MFC set to  0.000000
8/10/2010	5:24:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	5:24:57 PM	Tube furnace set to 750
8/10/2010	5:44:57 PM	H2 valve closed
8/10/2010	5:44:57 PM	BCl3 valve closed
8/10/2010	5:44:57 PM	PH3 valve closed
8/10/2010	5:44:57 PM	SiCl4 pre valve closed
8/10/2010	5:44:57 PM	SiCl4 post valve closed
8/10/2010	5:44:57 PM	Main Vac valve closed
8/10/2010	5:44:57 PM	Bypass valve closed
8/10/2010	5:44:57 PM	Helium valve opened
8/10/2010	5:44:57 PM	Bubbler valve opened
8/10/2010	5:44:57 PM	Helium MFC set to  500.000000
8/10/2010	5:44:57 PM	H2 MFC set to  0.000000
8/10/2010	5:44:57 PM	BCl3 MFC set to  0.000000
8/10/2010	5:44:57 PM	PHl3 MFC set to  0.000000
8/10/2010	5:44:57 PM	SiCl4 MFC set to  0.000000
8/10/2010	5:44:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	5:44:57 PM	Tube furnace set to 0
8/10/2010	6:04:57 PM	Helium valve closed
8/10/2010	6:04:57 PM	H2 valve closed
8/10/2010	6:04:57 PM	BCl3 valve closed
8/10/2010	6:04:57 PM	PH3 valve closed
8/10/2010	6:04:57 PM	SiCl4 pre valve closed
8/10/2010	6:04:57 PM	SiCl4 post valve closed
8/10/2010	6:04:57 PM	Main Vac valve closed
8/10/2010	6:04:57 PM	Bypass valve closed
8/10/2010	6:04:57 PM	Bubbler valve closed
8/10/2010	6:04:57 PM	Helium MFC set to  0.000000
8/10/2010	6:04:57 PM	H2 MFC set to  0.000000
8/10/2010	6:04:57 PM	BCl3 MFC set to  0.000000
8/10/2010	6:04:57 PM	PHl3 MFC set to  0.000000
8/10/2010	6:04:57 PM	SiCl4 MFC set to  0.000000
8/10/2010	6:04:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	6:04:57 PM	Tube furnace set to 0
8/10/2010	6:04:58 PM	Run finished at 6:04 PM
8/10/2010	6:49:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	6:49:49 PM	Recipe started at 6:49 PM
8/10/2010	6:49:49 PM	H2 valve closed
8/10/2010	6:49:49 PM	BCl3 valve closed
8/10/2010	6:49:49 PM	PH3 valve closed
8/10/2010	6:49:49 PM	SiCl4 pre valve closed
8/10/2010	6:49:49 PM	SiCl4 post valve closed
8/10/2010	6:49:49 PM	Main Vac valve closed
8/10/2010	6:49:49 PM	Bypass valve closed
8/10/2010	6:49:49 PM	Bubbler valve closed
8/10/2010	6:49:49 PM	Helium valve opened
8/10/2010	6:49:49 PM	Helium MFC set to  500.000000
8/10/2010	6:49:49 PM	H2 MFC set to  0.000000
8/10/2010	6:49:49 PM	BCl3 MFC set to  0.000000
8/10/2010	6:49:49 PM	PHl3 MFC set to  0.000000
8/10/2010	6:49:49 PM	SiCl4 MFC set to  0.000000
8/10/2010	6:49:49 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	6:49:49 PM	Tube furnace set to 0
8/10/2010	6:49:55 PM	Helium valve closed
8/10/2010	6:49:55 PM	H2 valve closed
8/10/2010	6:49:55 PM	BCl3 valve closed
8/10/2010	6:49:55 PM	PH3 valve closed
8/10/2010	6:49:55 PM	SiCl4 pre valve closed
8/10/2010	6:49:55 PM	SiCl4 post valve closed
8/10/2010	6:49:55 PM	Main Vac valve closed
8/10/2010	6:49:55 PM	Bypass valve closed
8/10/2010	6:49:55 PM	Bubbler valve closed
8/10/2010	6:49:55 PM	Helium MFC set to  0.000000
8/10/2010	6:49:55 PM	H2 MFC set to  0.000000
8/10/2010	6:49:55 PM	BCl3 MFC set to  0.000000
8/10/2010	6:49:55 PM	PHl3 MFC set to  0.000000
8/10/2010	6:49:55 PM	SiCl4 MFC set to  0.000000
8/10/2010	6:49:55 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	6:49:55 PM	Tube furnace set to 0
8/10/2010	6:49:55 PM	Run finished at 6:49 PM
8/10/2010	6:49:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	7:01:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	7:01:38 PM	Recipe started at 7:01 PM
8/10/2010	7:01:38 PM	Helium valve closed
8/10/2010	7:01:38 PM	H2 valve closed
8/10/2010	7:01:38 PM	BCl3 valve closed
8/10/2010	7:01:38 PM	PH3 valve closed
8/10/2010	7:01:38 PM	SiCl4 pre valve closed
8/10/2010	7:01:38 PM	SiCl4 post valve closed
8/10/2010	7:01:38 PM	Main Vac valve closed
8/10/2010	7:01:38 PM	Bubbler valve closed
8/10/2010	7:01:38 PM	Bypass valve opened
8/10/2010	7:01:38 PM	Helium MFC set to  0.000000
8/10/2010	7:01:38 PM	H2 MFC set to  0.000000
8/10/2010	7:01:38 PM	BCl3 MFC set to  0.000000
8/10/2010	7:01:38 PM	PHl3 MFC set to  0.000000
8/10/2010	7:01:38 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:01:38 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:01:38 PM	Tube furnace set to 0
8/10/2010	7:02:16 PM	Helium valve closed
8/10/2010	7:02:16 PM	H2 valve closed
8/10/2010	7:02:16 PM	BCl3 valve closed
8/10/2010	7:02:16 PM	PH3 valve closed
8/10/2010	7:02:16 PM	SiCl4 pre valve closed
8/10/2010	7:02:16 PM	SiCl4 post valve closed
8/10/2010	7:02:16 PM	Bubbler valve closed
8/10/2010	7:02:16 PM	Main Vac valve opened
8/10/2010	7:02:16 PM	Bypass valve opened
8/10/2010	7:02:16 PM	Helium MFC set to  0.000000
8/10/2010	7:02:16 PM	H2 MFC set to  0.000000
8/10/2010	7:02:16 PM	BCl3 MFC set to  0.000000
8/10/2010	7:02:16 PM	PHl3 MFC set to  0.000000
8/10/2010	7:02:16 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:02:16 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:02:17 PM	Tube furnace set to 0
8/10/2010	7:03:17 PM	H2 valve closed
8/10/2010	7:03:17 PM	BCl3 valve closed
8/10/2010	7:03:17 PM	PH3 valve closed
8/10/2010	7:03:17 PM	SiCl4 pre valve closed
8/10/2010	7:03:17 PM	SiCl4 post valve closed
8/10/2010	7:03:17 PM	Bubbler valve closed
8/10/2010	7:03:17 PM	Helium valve opened
8/10/2010	7:03:17 PM	Main Vac valve opened
8/10/2010	7:03:17 PM	Bypass valve opened
8/10/2010	7:03:17 PM	Helium MFC set to  100.000000
8/10/2010	7:03:17 PM	H2 MFC set to  0.000000
8/10/2010	7:03:17 PM	BCl3 MFC set to  0.000000
8/10/2010	7:03:17 PM	PHl3 MFC set to  0.000000
8/10/2010	7:03:17 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:03:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:03:17 PM	Tube furnace set to 0
8/10/2010	7:12:17 PM	Helium valve closed
8/10/2010	7:12:17 PM	H2 valve closed
8/10/2010	7:12:17 PM	BCl3 valve closed
8/10/2010	7:12:17 PM	PH3 valve closed
8/10/2010	7:12:17 PM	SiCl4 pre valve closed
8/10/2010	7:12:17 PM	SiCl4 post valve closed
8/10/2010	7:12:17 PM	Bubbler valve closed
8/10/2010	7:12:17 PM	Main Vac valve opened
8/10/2010	7:12:17 PM	Bypass valve opened
8/10/2010	7:12:17 PM	Helium MFC set to  0.000000
8/10/2010	7:12:17 PM	H2 MFC set to  0.000000
8/10/2010	7:12:17 PM	BCl3 MFC set to  0.000000
8/10/2010	7:12:17 PM	PHl3 MFC set to  0.000000
8/10/2010	7:12:17 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:12:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:12:17 PM	Tube furnace set to 0
8/10/2010	7:13:17 PM	H2 valve closed
8/10/2010	7:13:17 PM	BCl3 valve closed
8/10/2010	7:13:17 PM	PH3 valve closed
8/10/2010	7:13:17 PM	SiCl4 pre valve closed
8/10/2010	7:13:17 PM	SiCl4 post valve closed
8/10/2010	7:13:17 PM	Bubbler valve closed
8/10/2010	7:13:17 PM	Helium valve opened
8/10/2010	7:13:17 PM	Main Vac valve opened
8/10/2010	7:13:17 PM	Bypass valve opened
8/10/2010	7:13:17 PM	Helium MFC set to  100.000000
8/10/2010	7:13:17 PM	H2 MFC set to  0.000000
8/10/2010	7:13:17 PM	BCl3 MFC set to  0.000000
8/10/2010	7:13:17 PM	PHl3 MFC set to  0.000000
8/10/2010	7:13:17 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:13:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:13:17 PM	Tube furnace set to 0
8/10/2010	7:22:17 PM	Helium valve closed
8/10/2010	7:22:17 PM	H2 valve closed
8/10/2010	7:22:17 PM	BCl3 valve closed
8/10/2010	7:22:17 PM	PH3 valve closed
8/10/2010	7:22:17 PM	SiCl4 pre valve closed
8/10/2010	7:22:17 PM	SiCl4 post valve closed
8/10/2010	7:22:17 PM	Bubbler valve closed
8/10/2010	7:22:17 PM	Main Vac valve opened
8/10/2010	7:22:17 PM	Bypass valve opened
8/10/2010	7:22:17 PM	Helium MFC set to  0.000000
8/10/2010	7:22:17 PM	H2 MFC set to  0.000000
8/10/2010	7:22:17 PM	BCl3 MFC set to  0.000000
8/10/2010	7:22:17 PM	PHl3 MFC set to  0.000000
8/10/2010	7:22:17 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:22:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:22:17 PM	Tube furnace set to 0
8/10/2010	7:23:17 PM	H2 valve closed
8/10/2010	7:23:17 PM	BCl3 valve closed
8/10/2010	7:23:17 PM	PH3 valve closed
8/10/2010	7:23:17 PM	SiCl4 pre valve closed
8/10/2010	7:23:17 PM	SiCl4 post valve closed
8/10/2010	7:23:17 PM	Bubbler valve closed
8/10/2010	7:23:17 PM	Helium valve opened
8/10/2010	7:23:17 PM	Main Vac valve opened
8/10/2010	7:23:17 PM	Bypass valve opened
8/10/2010	7:23:17 PM	Helium MFC set to  100.000000
8/10/2010	7:23:17 PM	H2 MFC set to  0.000000
8/10/2010	7:23:17 PM	BCl3 MFC set to  0.000000
8/10/2010	7:23:17 PM	PHl3 MFC set to  0.000000
8/10/2010	7:23:17 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:23:17 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:23:18 PM	Tube furnace set to 0
8/10/2010	7:32:18 PM	Helium valve closed
8/10/2010	7:32:18 PM	H2 valve closed
8/10/2010	7:32:18 PM	BCl3 valve closed
8/10/2010	7:32:18 PM	PH3 valve closed
8/10/2010	7:32:18 PM	SiCl4 pre valve closed
8/10/2010	7:32:18 PM	SiCl4 post valve closed
8/10/2010	7:32:18 PM	Bubbler valve closed
8/10/2010	7:32:18 PM	Main Vac valve opened
8/10/2010	7:32:18 PM	Bypass valve opened
8/10/2010	7:32:18 PM	Helium MFC set to  0.000000
8/10/2010	7:32:18 PM	H2 MFC set to  0.000000
8/10/2010	7:32:18 PM	BCl3 MFC set to  0.000000
8/10/2010	7:32:18 PM	PHl3 MFC set to  0.000000
8/10/2010	7:32:18 PM	SiCl4 MFC set to  0.000000
8/10/2010	7:32:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	7:32:18 PM	Tube furnace set to 0
8/10/2010	7:32:19 PM	Run finished at 7:32 PM
8/10/2010	7:32:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	7:56:08 PM	Helium MFC set to  100.000000
8/10/2010	7:56:09 PM	Helium valve opened
8/10/2010	8:19:15 PM	Helium valve closed
8/10/2010	8:19:17 PM	Helium MFC set to  0.000000
8/10/2010	8:19:57 PM	Recipe started at 8:19 PM
8/10/2010	8:19:57 PM	Helium valve closed
8/10/2010	8:19:57 PM	BCl3 valve closed
8/10/2010	8:19:57 PM	PH3 valve closed
8/10/2010	8:19:57 PM	SiCl4 pre valve closed
8/10/2010	8:19:57 PM	SiCl4 post valve closed
8/10/2010	8:19:57 PM	Main Vac valve closed
8/10/2010	8:19:57 PM	Bypass valve closed
8/10/2010	8:19:57 PM	Bubbler valve closed
8/10/2010	8:19:57 PM	H2 valve opened
8/10/2010	8:19:57 PM	Helium MFC set to  0.000000
8/10/2010	8:19:57 PM	H2 MFC set to  500.000000
8/10/2010	8:19:57 PM	BCl3 MFC set to  0.000000
8/10/2010	8:19:57 PM	PHl3 MFC set to  0.000000
8/10/2010	8:19:57 PM	SiCl4 MFC set to  0.000000
8/10/2010	8:19:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	8:19:58 PM	Tube furnace set to 1000
8/10/2010	8:21:18 PM	Helium valve closed
8/10/2010	8:21:18 PM	BCl3 valve closed
8/10/2010	8:21:18 PM	PH3 valve closed
8/10/2010	8:21:18 PM	SiCl4 pre valve closed
8/10/2010	8:21:18 PM	SiCl4 post valve closed
8/10/2010	8:21:18 PM	Main Vac valve closed
8/10/2010	8:21:18 PM	Bypass valve closed
8/10/2010	8:21:18 PM	H2 valve opened
8/10/2010	8:21:18 PM	Bubbler valve opened
8/10/2010	8:21:18 PM	Helium MFC set to  0.000000
8/10/2010	8:21:18 PM	H2 MFC set to  500.000000
8/10/2010	8:21:18 PM	BCl3 MFC set to  0.000000
8/10/2010	8:21:18 PM	PHl3 MFC set to  0.000000
8/10/2010	8:21:18 PM	SiCl4 MFC set to  0.000000
8/10/2010	8:21:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	8:21:18 PM	Tube furnace set to 1000
8/10/2010	8:41:18 PM	Helium valve closed
8/10/2010	8:41:18 PM	PH3 valve closed
8/10/2010	8:41:18 PM	Main Vac valve closed
8/10/2010	8:41:18 PM	Bypass valve closed
8/10/2010	8:41:18 PM	H2 valve opened
8/10/2010	8:41:18 PM	BCl3 valve opened
8/10/2010	8:41:18 PM	SiCl4 pre valve opened
8/10/2010	8:41:18 PM	SiCl4 post valve opened
8/10/2010	8:41:18 PM	Bubbler valve opened
8/10/2010	8:41:18 PM	Helium MFC set to  0.000000
8/10/2010	8:41:18 PM	H2 MFC set to  500.000000
8/10/2010	8:41:18 PM	BCl3 MFC set to  35.000000
8/10/2010	8:41:18 PM	PHl3 MFC set to  0.000000
8/10/2010	8:41:18 PM	SiCl4 MFC set to  50.000000
8/10/2010	8:41:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	8:41:18 PM	Tube furnace set to 1000
8/10/2010	8:53:18 PM	Helium valve closed
8/10/2010	8:53:18 PM	BCl3 valve closed
8/10/2010	8:53:18 PM	PH3 valve closed
8/10/2010	8:53:18 PM	SiCl4 pre valve closed
8/10/2010	8:53:18 PM	SiCl4 post valve closed
8/10/2010	8:53:18 PM	Main Vac valve closed
8/10/2010	8:53:18 PM	Bypass valve closed
8/10/2010	8:53:18 PM	H2 valve opened
8/10/2010	8:53:18 PM	Bubbler valve opened
8/10/2010	8:53:18 PM	Helium MFC set to  0.000000
8/10/2010	8:53:18 PM	H2 MFC set to  500.000000
8/10/2010	8:53:18 PM	BCl3 MFC set to  0.000000
8/10/2010	8:53:18 PM	PHl3 MFC set to  0.000000
8/10/2010	8:53:18 PM	SiCl4 MFC set to  0.000000
8/10/2010	8:53:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	8:53:18 PM	Tube furnace set to 750
8/10/2010	9:13:18 PM	H2 valve closed
8/10/2010	9:13:18 PM	BCl3 valve closed
8/10/2010	9:13:18 PM	PH3 valve closed
8/10/2010	9:13:18 PM	SiCl4 pre valve closed
8/10/2010	9:13:18 PM	SiCl4 post valve closed
8/10/2010	9:13:18 PM	Main Vac valve closed
8/10/2010	9:13:18 PM	Bypass valve closed
8/10/2010	9:13:18 PM	Helium valve opened
8/10/2010	9:13:18 PM	Bubbler valve opened
8/10/2010	9:13:18 PM	Helium MFC set to  500.000000
8/10/2010	9:13:18 PM	H2 MFC set to  0.000000
8/10/2010	9:13:18 PM	BCl3 MFC set to  0.000000
8/10/2010	9:13:18 PM	PHl3 MFC set to  0.000000
8/10/2010	9:13:18 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:13:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:13:18 PM	Tube furnace set to 0
8/10/2010	9:33:18 PM	Helium valve closed
8/10/2010	9:33:18 PM	H2 valve closed
8/10/2010	9:33:18 PM	BCl3 valve closed
8/10/2010	9:33:18 PM	PH3 valve closed
8/10/2010	9:33:18 PM	SiCl4 pre valve closed
8/10/2010	9:33:18 PM	SiCl4 post valve closed
8/10/2010	9:33:18 PM	Main Vac valve closed
8/10/2010	9:33:18 PM	Bypass valve closed
8/10/2010	9:33:18 PM	Bubbler valve closed
8/10/2010	9:33:18 PM	Helium MFC set to  0.000000
8/10/2010	9:33:18 PM	H2 MFC set to  0.000000
8/10/2010	9:33:18 PM	BCl3 MFC set to  0.000000
8/10/2010	9:33:18 PM	PHl3 MFC set to  0.000000
8/10/2010	9:33:18 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:33:18 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:33:19 PM	Tube furnace set to 0
8/10/2010	9:33:19 PM	Run finished at 9:33 PM
8/10/2010	9:34:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	9:34:30 PM	Recipe started at 9:34 PM
8/10/2010	9:34:30 PM	H2 valve closed
8/10/2010	9:34:30 PM	BCl3 valve closed
8/10/2010	9:34:30 PM	PH3 valve closed
8/10/2010	9:34:30 PM	SiCl4 pre valve closed
8/10/2010	9:34:30 PM	SiCl4 post valve closed
8/10/2010	9:34:30 PM	Main Vac valve closed
8/10/2010	9:34:30 PM	Bypass valve closed
8/10/2010	9:34:30 PM	Bubbler valve closed
8/10/2010	9:34:30 PM	Helium valve opened
8/10/2010	9:34:30 PM	Helium MFC set to  500.000000
8/10/2010	9:34:30 PM	H2 MFC set to  0.000000
8/10/2010	9:34:30 PM	BCl3 MFC set to  0.000000
8/10/2010	9:34:30 PM	PHl3 MFC set to  0.000000
8/10/2010	9:34:30 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:34:30 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:34:31 PM	Tube furnace set to 0
8/10/2010	9:34:35 PM	Run aborted at 9:34 PM
8/10/2010	9:34:35 PM	Helium valve closed
8/10/2010	9:34:35 PM	H2 valve closed
8/10/2010	9:34:35 PM	BCl3 valve closed
8/10/2010	9:34:35 PM	PH3 valve closed
8/10/2010	9:34:35 PM	SiCl4 pre valve closed
8/10/2010	9:34:35 PM	SiCl4 post valve closed
8/10/2010	9:34:35 PM	Bypass valve closed
8/10/2010	9:34:35 PM	Main Vac valve closed
8/10/2010	9:34:35 PM	Bubbler valve closed
8/10/2010	9:34:35 PM	Helium MFC set to  0.000000
8/10/2010	9:34:35 PM	H2 MFC set to  0.000000
8/10/2010	9:34:35 PM	BCl3 MFC set to  0.000000
8/10/2010	9:34:35 PM	PHl3 MFC set to  0.000000
8/10/2010	9:34:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:34:35 PM	Tube furnace set to 0
8/10/2010	9:34:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2010	9:44:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	9:44:54 PM	Recipe started at 9:44 PM
8/10/2010	9:44:54 PM	Helium valve closed
8/10/2010	9:44:54 PM	H2 valve closed
8/10/2010	9:44:54 PM	BCl3 valve closed
8/10/2010	9:44:54 PM	PH3 valve closed
8/10/2010	9:44:54 PM	SiCl4 pre valve closed
8/10/2010	9:44:54 PM	SiCl4 post valve closed
8/10/2010	9:44:54 PM	Main Vac valve closed
8/10/2010	9:44:54 PM	Bubbler valve closed
8/10/2010	9:44:54 PM	Bypass valve opened
8/10/2010	9:44:54 PM	Helium MFC set to  0.000000
8/10/2010	9:44:54 PM	H2 MFC set to  0.000000
8/10/2010	9:44:54 PM	BCl3 MFC set to  0.000000
8/10/2010	9:44:54 PM	PHl3 MFC set to  0.000000
8/10/2010	9:44:54 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:44:54 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:44:54 PM	Tube furnace set to 0
8/10/2010	9:45:34 PM	Helium valve closed
8/10/2010	9:45:34 PM	H2 valve closed
8/10/2010	9:45:34 PM	BCl3 valve closed
8/10/2010	9:45:34 PM	PH3 valve closed
8/10/2010	9:45:34 PM	SiCl4 pre valve closed
8/10/2010	9:45:34 PM	SiCl4 post valve closed
8/10/2010	9:45:34 PM	Bubbler valve closed
8/10/2010	9:45:34 PM	Main Vac valve opened
8/10/2010	9:45:34 PM	Bypass valve opened
8/10/2010	9:45:34 PM	Helium MFC set to  0.000000
8/10/2010	9:45:34 PM	H2 MFC set to  0.000000
8/10/2010	9:45:34 PM	BCl3 MFC set to  0.000000
8/10/2010	9:45:34 PM	PHl3 MFC set to  0.000000
8/10/2010	9:45:34 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:45:34 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:45:34 PM	Tube furnace set to 0
8/10/2010	9:46:34 PM	H2 valve closed
8/10/2010	9:46:34 PM	BCl3 valve closed
8/10/2010	9:46:34 PM	PH3 valve closed
8/10/2010	9:46:34 PM	SiCl4 pre valve closed
8/10/2010	9:46:34 PM	SiCl4 post valve closed
8/10/2010	9:46:34 PM	Bubbler valve closed
8/10/2010	9:46:34 PM	Helium valve opened
8/10/2010	9:46:34 PM	Main Vac valve opened
8/10/2010	9:46:34 PM	Bypass valve opened
8/10/2010	9:46:34 PM	Helium MFC set to  100.000000
8/10/2010	9:46:34 PM	H2 MFC set to  0.000000
8/10/2010	9:46:34 PM	BCl3 MFC set to  0.000000
8/10/2010	9:46:34 PM	PHl3 MFC set to  0.000000
8/10/2010	9:46:34 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:46:34 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:46:34 PM	Tube furnace set to 0
8/10/2010	9:55:34 PM	Helium valve closed
8/10/2010	9:55:34 PM	H2 valve closed
8/10/2010	9:55:34 PM	BCl3 valve closed
8/10/2010	9:55:34 PM	PH3 valve closed
8/10/2010	9:55:34 PM	SiCl4 pre valve closed
8/10/2010	9:55:34 PM	SiCl4 post valve closed
8/10/2010	9:55:34 PM	Bubbler valve closed
8/10/2010	9:55:34 PM	Main Vac valve opened
8/10/2010	9:55:34 PM	Bypass valve opened
8/10/2010	9:55:34 PM	Helium MFC set to  0.000000
8/10/2010	9:55:34 PM	H2 MFC set to  0.000000
8/10/2010	9:55:34 PM	BCl3 MFC set to  0.000000
8/10/2010	9:55:34 PM	PHl3 MFC set to  0.000000
8/10/2010	9:55:34 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:55:34 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:55:34 PM	Tube furnace set to 0
8/10/2010	9:56:34 PM	H2 valve closed
8/10/2010	9:56:34 PM	BCl3 valve closed
8/10/2010	9:56:34 PM	PH3 valve closed
8/10/2010	9:56:34 PM	SiCl4 pre valve closed
8/10/2010	9:56:34 PM	SiCl4 post valve closed
8/10/2010	9:56:34 PM	Bubbler valve closed
8/10/2010	9:56:34 PM	Helium valve opened
8/10/2010	9:56:34 PM	Main Vac valve opened
8/10/2010	9:56:34 PM	Bypass valve opened
8/10/2010	9:56:34 PM	Helium MFC set to  100.000000
8/10/2010	9:56:34 PM	H2 MFC set to  0.000000
8/10/2010	9:56:34 PM	BCl3 MFC set to  0.000000
8/10/2010	9:56:34 PM	PHl3 MFC set to  0.000000
8/10/2010	9:56:34 PM	SiCl4 MFC set to  0.000000
8/10/2010	9:56:34 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	9:56:35 PM	Tube furnace set to 0
8/10/2010	10:05:34 PM	Helium valve closed
8/10/2010	10:05:35 PM	H2 valve closed
8/10/2010	10:05:35 PM	BCl3 valve closed
8/10/2010	10:05:35 PM	PH3 valve closed
8/10/2010	10:05:35 PM	SiCl4 pre valve closed
8/10/2010	10:05:35 PM	SiCl4 post valve closed
8/10/2010	10:05:35 PM	Bubbler valve closed
8/10/2010	10:05:35 PM	Main Vac valve opened
8/10/2010	10:05:35 PM	Bypass valve opened
8/10/2010	10:05:35 PM	Helium MFC set to  0.000000
8/10/2010	10:05:35 PM	H2 MFC set to  0.000000
8/10/2010	10:05:35 PM	BCl3 MFC set to  0.000000
8/10/2010	10:05:35 PM	PHl3 MFC set to  0.000000
8/10/2010	10:05:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:05:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:05:35 PM	Tube furnace set to 0
8/10/2010	10:06:35 PM	H2 valve closed
8/10/2010	10:06:35 PM	BCl3 valve closed
8/10/2010	10:06:35 PM	PH3 valve closed
8/10/2010	10:06:35 PM	SiCl4 pre valve closed
8/10/2010	10:06:35 PM	SiCl4 post valve closed
8/10/2010	10:06:35 PM	Bubbler valve closed
8/10/2010	10:06:35 PM	Helium valve opened
8/10/2010	10:06:35 PM	Main Vac valve opened
8/10/2010	10:06:35 PM	Bypass valve opened
8/10/2010	10:06:35 PM	Helium MFC set to  100.000000
8/10/2010	10:06:35 PM	H2 MFC set to  0.000000
8/10/2010	10:06:35 PM	BCl3 MFC set to  0.000000
8/10/2010	10:06:35 PM	PHl3 MFC set to  0.000000
8/10/2010	10:06:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:06:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:06:35 PM	Tube furnace set to 0
8/10/2010	10:15:35 PM	Helium valve closed
8/10/2010	10:15:35 PM	H2 valve closed
8/10/2010	10:15:35 PM	BCl3 valve closed
8/10/2010	10:15:35 PM	PH3 valve closed
8/10/2010	10:15:35 PM	SiCl4 pre valve closed
8/10/2010	10:15:35 PM	SiCl4 post valve closed
8/10/2010	10:15:35 PM	Bubbler valve closed
8/10/2010	10:15:35 PM	Main Vac valve opened
8/10/2010	10:15:35 PM	Bypass valve opened
8/10/2010	10:15:35 PM	Helium MFC set to  0.000000
8/10/2010	10:15:35 PM	H2 MFC set to  0.000000
8/10/2010	10:15:35 PM	BCl3 MFC set to  0.000000
8/10/2010	10:15:35 PM	PHl3 MFC set to  0.000000
8/10/2010	10:15:35 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:15:35 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:15:35 PM	Tube furnace set to 0
8/10/2010	10:15:36 PM	Run finished at 10:15 PM
8/10/2010	10:15:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	10:20:41 PM	Helium MFC set to  100.000000
8/10/2010	10:20:42 PM	Helium valve opened
8/10/2010	10:27:05 PM	Helium valve closed
8/10/2010	10:27:07 PM	Helium MFC set to  0.000000
8/10/2010	10:27:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	10:27:51 PM	Recipe started at 10:27 PM
8/10/2010	10:27:51 PM	Helium valve closed
8/10/2010	10:27:51 PM	H2 valve closed
8/10/2010	10:27:51 PM	BCl3 valve closed
8/10/2010	10:27:51 PM	PH3 valve closed
8/10/2010	10:27:51 PM	SiCl4 pre valve closed
8/10/2010	10:27:51 PM	SiCl4 post valve closed
8/10/2010	10:27:51 PM	Main Vac valve closed
8/10/2010	10:27:51 PM	Bubbler valve closed
8/10/2010	10:27:51 PM	Bypass valve opened
8/10/2010	10:27:51 PM	Helium MFC set to  0.000000
8/10/2010	10:27:51 PM	H2 MFC set to  0.000000
8/10/2010	10:27:51 PM	BCl3 MFC set to  0.000000
8/10/2010	10:27:51 PM	PHl3 MFC set to  0.000000
8/10/2010	10:27:51 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:27:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:27:51 PM	Tube furnace set to 0
8/10/2010	10:27:51 PM	Helium valve closed
8/10/2010	10:27:51 PM	H2 valve closed
8/10/2010	10:27:51 PM	BCl3 valve closed
8/10/2010	10:27:51 PM	PH3 valve closed
8/10/2010	10:27:51 PM	SiCl4 pre valve closed
8/10/2010	10:27:51 PM	SiCl4 post valve closed
8/10/2010	10:27:51 PM	Bubbler valve closed
8/10/2010	10:27:51 PM	Main Vac valve opened
8/10/2010	10:27:51 PM	Bypass valve opened
8/10/2010	10:27:51 PM	Helium MFC set to  0.000000
8/10/2010	10:27:51 PM	H2 MFC set to  0.000000
8/10/2010	10:27:51 PM	BCl3 MFC set to  0.000000
8/10/2010	10:27:51 PM	PHl3 MFC set to  0.000000
8/10/2010	10:27:51 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:27:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:27:51 PM	Tube furnace set to 0
8/10/2010	10:28:51 PM	H2 valve closed
8/10/2010	10:28:51 PM	BCl3 valve closed
8/10/2010	10:28:51 PM	PH3 valve closed
8/10/2010	10:28:51 PM	SiCl4 pre valve closed
8/10/2010	10:28:51 PM	SiCl4 post valve closed
8/10/2010	10:28:51 PM	Bubbler valve closed
8/10/2010	10:28:51 PM	Helium valve opened
8/10/2010	10:28:51 PM	Main Vac valve opened
8/10/2010	10:28:51 PM	Bypass valve opened
8/10/2010	10:28:51 PM	Helium MFC set to  100.000000
8/10/2010	10:28:51 PM	H2 MFC set to  0.000000
8/10/2010	10:28:51 PM	BCl3 MFC set to  0.000000
8/10/2010	10:28:51 PM	PHl3 MFC set to  0.000000
8/10/2010	10:28:51 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:28:51 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:28:52 PM	Tube furnace set to 0
8/10/2010	10:37:51 PM	Helium valve closed
8/10/2010	10:37:52 PM	H2 valve closed
8/10/2010	10:37:52 PM	BCl3 valve closed
8/10/2010	10:37:52 PM	PH3 valve closed
8/10/2010	10:37:52 PM	SiCl4 pre valve closed
8/10/2010	10:37:52 PM	SiCl4 post valve closed
8/10/2010	10:37:52 PM	Bubbler valve closed
8/10/2010	10:37:52 PM	Main Vac valve opened
8/10/2010	10:37:52 PM	Bypass valve opened
8/10/2010	10:37:52 PM	Helium MFC set to  0.000000
8/10/2010	10:37:52 PM	H2 MFC set to  0.000000
8/10/2010	10:37:52 PM	BCl3 MFC set to  0.000000
8/10/2010	10:37:52 PM	PHl3 MFC set to  0.000000
8/10/2010	10:37:52 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:37:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:37:52 PM	Tube furnace set to 0
8/10/2010	10:38:52 PM	H2 valve closed
8/10/2010	10:38:52 PM	BCl3 valve closed
8/10/2010	10:38:52 PM	PH3 valve closed
8/10/2010	10:38:52 PM	SiCl4 pre valve closed
8/10/2010	10:38:52 PM	SiCl4 post valve closed
8/10/2010	10:38:52 PM	Bubbler valve closed
8/10/2010	10:38:52 PM	Helium valve opened
8/10/2010	10:38:52 PM	Main Vac valve opened
8/10/2010	10:38:52 PM	Bypass valve opened
8/10/2010	10:38:52 PM	Helium MFC set to  100.000000
8/10/2010	10:38:52 PM	H2 MFC set to  0.000000
8/10/2010	10:38:52 PM	BCl3 MFC set to  0.000000
8/10/2010	10:38:52 PM	PHl3 MFC set to  0.000000
8/10/2010	10:38:52 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:38:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:38:52 PM	Tube furnace set to 0
8/10/2010	10:47:52 PM	Helium valve closed
8/10/2010	10:47:52 PM	H2 valve closed
8/10/2010	10:47:52 PM	BCl3 valve closed
8/10/2010	10:47:52 PM	PH3 valve closed
8/10/2010	10:47:52 PM	SiCl4 pre valve closed
8/10/2010	10:47:52 PM	SiCl4 post valve closed
8/10/2010	10:47:52 PM	Bubbler valve closed
8/10/2010	10:47:52 PM	Main Vac valve opened
8/10/2010	10:47:52 PM	Bypass valve opened
8/10/2010	10:47:52 PM	Helium MFC set to  0.000000
8/10/2010	10:47:52 PM	H2 MFC set to  0.000000
8/10/2010	10:47:52 PM	BCl3 MFC set to  0.000000
8/10/2010	10:47:52 PM	PHl3 MFC set to  0.000000
8/10/2010	10:47:52 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:47:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:47:52 PM	Tube furnace set to 0
8/10/2010	10:48:52 PM	H2 valve closed
8/10/2010	10:48:52 PM	BCl3 valve closed
8/10/2010	10:48:52 PM	PH3 valve closed
8/10/2010	10:48:52 PM	SiCl4 pre valve closed
8/10/2010	10:48:52 PM	SiCl4 post valve closed
8/10/2010	10:48:52 PM	Bubbler valve closed
8/10/2010	10:48:52 PM	Helium valve opened
8/10/2010	10:48:52 PM	Main Vac valve opened
8/10/2010	10:48:52 PM	Bypass valve opened
8/10/2010	10:48:52 PM	Helium MFC set to  100.000000
8/10/2010	10:48:52 PM	H2 MFC set to  0.000000
8/10/2010	10:48:52 PM	BCl3 MFC set to  0.000000
8/10/2010	10:48:52 PM	PHl3 MFC set to  0.000000
8/10/2010	10:48:52 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:48:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:48:52 PM	Tube furnace set to 0
8/10/2010	10:57:52 PM	Helium valve closed
8/10/2010	10:57:52 PM	H2 valve closed
8/10/2010	10:57:52 PM	BCl3 valve closed
8/10/2010	10:57:52 PM	PH3 valve closed
8/10/2010	10:57:52 PM	SiCl4 pre valve closed
8/10/2010	10:57:52 PM	SiCl4 post valve closed
8/10/2010	10:57:52 PM	Bubbler valve closed
8/10/2010	10:57:52 PM	Main Vac valve opened
8/10/2010	10:57:52 PM	Bypass valve opened
8/10/2010	10:57:52 PM	Helium MFC set to  0.000000
8/10/2010	10:57:52 PM	H2 MFC set to  0.000000
8/10/2010	10:57:52 PM	BCl3 MFC set to  0.000000
8/10/2010	10:57:52 PM	PHl3 MFC set to  0.000000
8/10/2010	10:57:52 PM	SiCl4 MFC set to  0.000000
8/10/2010	10:57:52 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	10:57:52 PM	Tube furnace set to 0
8/10/2010	10:57:53 PM	Run finished at 10:57 PM
8/10/2010	10:57:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/10/2010	11:16:41 PM	Helium MFC set to  100.000000
8/10/2010	11:16:42 PM	Helium valve opened
8/10/2010	11:20:18 PM	Helium valve closed
8/10/2010	11:20:20 PM	Helium MFC set to  0.000000
8/10/2010	11:20:58 PM	Recipe started at 11:20 PM
8/10/2010	11:20:58 PM	Helium valve closed
8/10/2010	11:20:58 PM	BCl3 valve closed
8/10/2010	11:20:58 PM	PH3 valve closed
8/10/2010	11:20:58 PM	SiCl4 pre valve closed
8/10/2010	11:20:58 PM	SiCl4 post valve closed
8/10/2010	11:20:58 PM	Main Vac valve closed
8/10/2010	11:20:58 PM	Bypass valve closed
8/10/2010	11:20:58 PM	Bubbler valve closed
8/10/2010	11:20:58 PM	H2 valve opened
8/10/2010	11:20:58 PM	Helium MFC set to  0.000000
8/10/2010	11:20:58 PM	H2 MFC set to  500.000000
8/10/2010	11:20:58 PM	BCl3 MFC set to  0.000000
8/10/2010	11:20:58 PM	PHl3 MFC set to  0.000000
8/10/2010	11:20:58 PM	SiCl4 MFC set to  0.000000
8/10/2010	11:20:58 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:20:58 PM	Tube furnace set to 1000
8/10/2010	11:22:19 PM	Helium valve closed
8/10/2010	11:22:19 PM	BCl3 valve closed
8/10/2010	11:22:19 PM	PH3 valve closed
8/10/2010	11:22:19 PM	SiCl4 pre valve closed
8/10/2010	11:22:19 PM	SiCl4 post valve closed
8/10/2010	11:22:19 PM	Main Vac valve closed
8/10/2010	11:22:19 PM	Bypass valve closed
8/10/2010	11:22:19 PM	H2 valve opened
8/10/2010	11:22:19 PM	Bubbler valve opened
8/10/2010	11:22:19 PM	Helium MFC set to  0.000000
8/10/2010	11:22:19 PM	H2 MFC set to  500.000000
8/10/2010	11:22:19 PM	BCl3 MFC set to  0.000000
8/10/2010	11:22:19 PM	PHl3 MFC set to  0.000000
8/10/2010	11:22:19 PM	SiCl4 MFC set to  0.000000
8/10/2010	11:22:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:22:19 PM	Tube furnace set to 1000
8/10/2010	11:42:19 PM	Helium valve closed
8/10/2010	11:42:19 PM	PH3 valve closed
8/10/2010	11:42:19 PM	Main Vac valve closed
8/10/2010	11:42:19 PM	Bypass valve closed
8/10/2010	11:42:19 PM	H2 valve opened
8/10/2010	11:42:19 PM	BCl3 valve opened
8/10/2010	11:42:19 PM	SiCl4 pre valve opened
8/10/2010	11:42:19 PM	SiCl4 post valve opened
8/10/2010	11:42:19 PM	Bubbler valve opened
8/10/2010	11:42:19 PM	Helium MFC set to  0.000000
8/10/2010	11:42:19 PM	H2 MFC set to  500.000000
8/10/2010	11:42:19 PM	BCl3 MFC set to  35.000000
8/10/2010	11:42:19 PM	PHl3 MFC set to  0.000000
8/10/2010	11:42:19 PM	SiCl4 MFC set to  50.000000
8/10/2010	11:42:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:42:19 PM	Tube furnace set to 1000
8/10/2010	11:54:19 PM	Helium valve closed
8/10/2010	11:54:19 PM	BCl3 valve closed
8/10/2010	11:54:19 PM	PH3 valve closed
8/10/2010	11:54:19 PM	SiCl4 pre valve closed
8/10/2010	11:54:19 PM	SiCl4 post valve closed
8/10/2010	11:54:19 PM	Main Vac valve closed
8/10/2010	11:54:19 PM	Bypass valve closed
8/10/2010	11:54:19 PM	H2 valve opened
8/10/2010	11:54:19 PM	Bubbler valve opened
8/10/2010	11:54:19 PM	Helium MFC set to  0.000000
8/10/2010	11:54:19 PM	H2 MFC set to  500.000000
8/10/2010	11:54:19 PM	BCl3 MFC set to  0.000000
8/10/2010	11:54:19 PM	PHl3 MFC set to  0.000000
8/10/2010	11:54:19 PM	SiCl4 MFC set to  0.000000
8/10/2010	11:54:19 PM	Bypass solenoid MFC set to  0.000000
8/10/2010	11:54:19 PM	Tube furnace set to 750
